SkyWater SKY130 PDK

Table Of Contents

Masks

The masks.csv file provides a raw information for the mask layers (name, acronym, usage) currently used found on 130nm processes at SkyWater.

The masks which are used on the SKY130 technology node (that this PDK supports) are marked.

Table 1 Table - Masks

Mask	Acronym	Used in SKY130
Field Oxide	FOM	X
Deep N-Well	DNM	X
P-Well Block Mask	PWBM
P-Well Drain Extended	PWDEM
N-Well*	NWM	X
High Vt PCh*	HVTPM	X
Low Vt Nch*	LVTNM	X
HLow VT PCh Radio*	HVTRM	X
N-Core Implant	NCM
Tunnel Mask	TUNM	X
ONO Mask	ONOM	X
Low Voltage Oxide	LVOM	X
Resistor Protect	RPM	X
Poly 1	P1M	X
N-tip Implant	NTM	X
High Volt. N-tip	HVNTM	X
Lightly Doped N-tip	LDNTM	X
Nitride Poly Cut	NPCM	X
P+ Implant	PSDM	X
N+ Implant	NSDM	X
Local Intr Cont.1	LICM1	X
Local Intrcnct 1	LI1M	X
Contact	CTM1	X
Open Frame Mask	OFM
Metal 1	MM1	X
Via	VIM	X
Capacitor MiM	CAPM
Metal 2	MM2	X
Via 2-TNV	VIM2
Via 2-S8TM	VIM2
Via 2-PLM	VIM2	X
Metal 3-TLM	MM3
Metal 3-S8TM	MM3
Metal 3-PLM	MM3	X
Pad Via	VIPDM
Via3-PLM	VIM3	X
Inductor-TLM	INDM
Metal 4	MM4	X
Via4	VIM4	X
Metal 5	MM5	X
Nitride Seal Mask	NSM	X
Pad (scribe protect)	PDM	X
Pad (scribe unprotect)	PDM
Polyimide	PMM
Polyimide_ExtFab	PMM[E]
Pad&Polyimide_ExtFab	PDMM[E]
DECA PBO	PBO	X
Cu Inductor/Redist.	CU1M	X
Polyimide 2 (2)	PMM2	X
Under Bump Metal	UBM
Bumps	BUMP

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